Effect of seed layer stress on the fabrication of monolithic MEMS microstructure

Author： Chung C.   Fang Y.   Cheng C.   Hong Y.   Wang C.  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.13, Iss.3-4, 2007-02, pp. : 299-304

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