Author: Bischoff L. Akhmadaliev C. Mair A.W.R. Mair G.L.R. Ganetsos T. Aidinis C.J.
Publisher: Springer Publishing Company
ISSN: 0947-8396
Source: Applied Physics A, Vol.79, Iss.1, 2004-06, pp. : 89-92
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Related content
Understanding how the liquid-metal ion source works
By Forbest R.G.
Vacuum, Vol. 48, Iss. 1, 1997-01 ,pp. :
Computer simulation of emission of neutrals from liquid metal ion source
Vacuum, Vol. 51, Iss. 2, 1998-10 ,pp. :
Emission characteristics of an Au-Ge liquid metal ion source
By Georgieva S. Tzvetkov T. Vitchev R.G. Drandarov N.
Vacuum, Vol. 51, Iss. 2, 1998-10 ,pp. :
Dy-Ni alloy metal ion source for focused ion beam implantation
By Melnikov A. Hillmann M. Kamphausen I. Oswald W. Stauche P. Wernhardt R. Wieck A.D.
Vacuum, Vol. 67, Iss. 2, 2002-09 ,pp. :