Dy-Ni alloy metal ion source for focused ion beam implantation

Author: Melnikov A.   Hillmann M.   Kamphausen I.   Oswald W.   Stauche P.   Wernhardt R.   Wieck A.D.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.67, Iss.2, 2002-09, pp. : 249-251

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Abstract