Fabrication of stabilized piezoelectric thick film for silicon-based MEMS device

Author： Kwon T.Y.   Kim Y.B.   Eom K.   Yoon D.S.   Lee H.L.   Kim T.S.  

Publisher： Springer Publishing Company

ISSN： 0947-8396

Source： Applied Physics A, Vol.88, Iss.4, 2007-09, pp. : 627-632

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