Silicon quantum integrated circuits - an attempt to fabricate silicon-based quantum devices using CMOS fabrication techniques

Author： Paul D.J.   Coonan B.   Redmond G.   O'Neill B.J.   Crean G.M.   Hollander B.   Mantl S.   Zozoulenko I.   Berggren K.-F.   Lazzari J.-L.   Arnaud d'Avitaya F.   Derrien J.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.336, Iss.1, 1998-12, pp. : 130-136

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