TEM investigation of semipolar GaN layers grown on Si(001) offcut substrates

Author: Sorokin L M   Myasoedov A V   Kalmykov A E   Kirilenko D A   Bessolov V N   Kukushkin S A  

Publisher: IOP Publishing

E-ISSN: 1361-6641|30|11|114002-114007

ISSN: 0268-1242

Source: Semiconductor Science and Technology, Vol.30, Iss.11, 2015-11, pp. : 114002-114007

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Abstract