Combination of electron energy-loss spectroscopy and energy dispersive x-ray spectroscopy to determine indium concentration in InGaN thin film structures

Author: Wang X   Chauvat M P   Ruterana P   Walther T  

Publisher: IOP Publishing

E-ISSN: 1361-6641|30|11|114011-114016

ISSN: 0268-1242

Source: Semiconductor Science and Technology, Vol.30, Iss.11, 2015-11, pp. : 114011-114016

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