Base‐amplifying silicone resins with photobase‐generating side chains and their application to negative‐working photoresists

Publisher： John Wiley & Sons Inc

E-ISSN： 1099-0518|53|10|1205-1212

ISSN： 0887-624x

Source： Journal of Polymer Science Part A: Polymer Chemistry, Vol.53, Iss.10, 2015-05, pp. : 1205-1212

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