Consideration of Femtosecond Laser-Induced Effect on Semiconductor Material SiC Substrate for CMP Processing

Publisher： Trans Tech Publications

E-ISSN： 1662-7482|2015|799|458-462

ISSN： 1660-9336

Source： Applied Mechanics and Materials, Vol.2015, Iss.799, 2015-11, pp. : 458-462

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