Photolithographic Process for Creating Micro-Grating on Silicon Substrate for Biosensor Application

Publisher： Trans Tech Publications

E-ISSN： 1662-7482|2015|804|159-162

ISSN： 1660-9336

Source： Applied Mechanics and Materials, Vol.2015, Iss.804, 2015-11, pp. : 159-162

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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