Comparison of Bond Strength of Silicon-Silica and Silicon-Pyrex in Wafer Bonding

Publisher: Trans Tech Publications

E-ISSN: 1662-8985|2014|1082|416-419

ISSN: 1022-6680

Source: Advanced Materials Research, Vol.2014, Iss.1082, 2015-02, pp. : 416-419

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Abstract