Anisotropic Co-Hf Thin Films for Micro-Sensors and Micro-Transducers

Publisher： Trans Tech Publications

E-ISSN： 1662-9795|2015|644|65-69

ISSN： 1013-9826

Source： Key Engineering Materials, Vol.2015, Iss.644, 2015-06, pp. : 65-69

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