Finishing of 4H-SiC (0001) by Combination of Thermal Oxidation and Abrasive Polishing

Publisher: Trans Tech Publications

E-ISSN: 1662-9795|2014|625|192-195

ISSN: 1013-9826

Source: Key Engineering Materials, Vol.2014, Iss.625, 2014-10, pp. : 192-195

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Abstract