The Deposition Rate, Hardness and Tribological Properties of a-C:H Coatings with a Tungsten Filament-Assisted Ionized Reaction Gas

Publisher: Trans Tech Publications

E-ISSN: 1662-9795|2015|642|135-140

ISSN: 1013-9826

Source: Key Engineering Materials, Vol.2015, Iss.642, 2015-05, pp. : 135-140

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Abstract