Publisher: Trans Tech Publications
E-ISSN: 1662-9795|2015|645|653-656
ISSN: 1013-9826
Source: Key Engineering Materials, Vol.2015, Iss.645, 2015-06, pp. : 653-656
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
The Research on MEMS Micro Capacitance Sensor Detection Based on MS3110
Key Engineering Materials, Vol. 2015, Iss. 645, 2015-06 ,pp. :
Design of Minimal Capacitance Detect Circuit for MEMS Capacitive Sensor
Key Engineering Materials, Vol. 2015, Iss. 645, 2015-06 ,pp. :
Multi-Chip Module Design of a MEMS Air Pressure Sensor
Key Engineering Materials, Vol. 2015, Iss. 645, 2015-06 ,pp. :