Publisher: Trans Tech Publications
E-ISSN: 1662-9752|2015|821|281-284
ISSN: 0255-5476
Source: Materials Science Forum, Vol.2015, Iss.821, 2015-07, pp. : 281-284
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Deposition of 3C-SiC films using ECR plasma of methylsilane
By Matsutani T. Kiuchi M. Takeuchi T. Matsumoto T. Mimoto K. Goto S.
Vacuum, Vol. 59, Iss. 1, 2000-10 ,pp. :
Raman study on residual strains in thin 3C-SiC epitaxial layers grown on Si(001)
Thin Solid Films, Vol. 368, Iss. 2, 2000-06 ,pp. :
PLD Grown 3C-SiC Thin Films on Si: Morphology and Structure
Materials Science Forum, Vol. 2015, Iss. 821, 2015-07 ,pp. :
3C-SiC: New Interest for MEMS Devices
Materials Science Forum, Vol. 2014, Iss. 806, 2015-01 ,pp. :