Integrated Solenoid Inductor with [FeCoSiN/SiN_x]₁₈ Multilayer Magnetic Film for GHz Applications

E-ISSN： 1662-9752|2015|833|85-89

ISSN： 0255-5476

Source： Materials Science Forum, Vol.2015, Iss.833, 2015-12, pp. : 85-89

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