4.5-kV 20-mΩ.cm2 Implantation-Free 4H-SiC BJT with Trench Structures on the Junction Termination Extension

Publisher: Trans Tech Publications

E-ISSN: 1662-9752|2015|821|838-841

ISSN: 0255-5476

Source: Materials Science Forum, Vol.2015, Iss.821, 2015-07, pp. : 838-841

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Abstract