A chemically stable PVD multilayer encapsulation for lithium microbatteries

Author: Ribeiro J F   Sousa R   Cunha D J   Vieira E M F   Silva M M   Dupont L   Goncalves L M  

Publisher: IOP Publishing

E-ISSN: 1361-6463|48|39|395306-395312

ISSN: 0022-3727

Source: Journal of Physics D: Applied Physics, Vol.48, Iss.39, 2015-10, pp. : 395306-395312

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Abstract