Ion induced electron emission from chemically cleaned Si and Ge

Author: Urrabazo David   Veyan Jean-Francois   Goeckner Matthew J   Overzet Lawrence J  

Publisher: IOP Publishing

E-ISSN: 1361-6463|48|40|405201-405208

ISSN: 0022-3727

Source: Journal of Physics D: Applied Physics, Vol.48, Iss.40, 2015-10, pp. : 405201-405208

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Abstract