A six-degree-of-freedom magnetic levitation fine stage for a high-precision and high-acceleration dual-servo stage

Author： Kim MyeongHyeon   Jeong Jae-heon   Kim HyoYoung   Gweon DaeGab  

Publisher： IOP Publishing

E-ISSN： 1361-665X|24|10|105022-105034

ISSN： 0964-1726

Source： Smart Materials and Structures, Vol.24, Iss.10, 2015-10, pp. : 105022-105034

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