Template–polymer commensurability and directed self‐assembly block copolymer lithography

Publisher: John Wiley & Sons Inc

E-ISSN: 1099-0488|53|8|595-603

ISSN: 0887-6266

Source: Journal of Polymer Science Part B: Polymer Physics, Vol.53, Iss.8, 2015-04, pp. : 595-603

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