Analysis of resonant planar dissipative network antennas for rf inductively coupled plasma sources

Author: Guittienne Ph   Howling A A   Hollenstein Ch  

Publisher: IOP Publishing

E-ISSN: 1361-6595|23|1|15006-15018

ISSN: 0963-0252

Source: Plasma Sources Science and Technology, Vol.23, Iss.1, 2014-02, pp. : 15006-15018

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Abstract