Equivalence of the hard-wall and kinetic-fluid models of collisionless electron heating in capacitively coupled discharges

Author： Lafleur T   Chabert P   Turner M M   Booth J P  

Publisher： IOP Publishing

E-ISSN： 1361-6595|23|1|15016-15026

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.23, Iss.1, 2014-02, pp. : 15016-15026

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