Nonlinear standing wave excitation by series resonance-enhanced harmonics in low pressure capacitive discharges

Author： Lieberman M A   Lichtenberg A J   Kawamura E   Marakhtanov A M  

Publisher： IOP Publishing

E-ISSN： 1361-6595|24|5|55011-55023

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.24, Iss.5, 2015-10, pp. : 55011-55023

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Extinction of RF capacitive low-pressure discharges

By  

EPL (EUROPHYSICS LETTERS), Vol. 71, Iss. 3, 2005-08 ,pp. : 407-411

Edp Sciences

Access to resources Recommend Favorite

The effect of the driving frequency on the confinement of beam electrons and plasma density in low-pressure capacitive discharges

By Wilczek S   Trieschmann J   Schulze J   Schuengel E   Brinkmann R P   Derzsi A   Korolov I   Donkó Z   Mussenbrock T  

Plasma Sources Science and Technology, Vol. 24, Iss. 2, 2015-04 ,pp. : 24002-24014

IOP Publishing

Access to resources Recommend Favorite

High-Resolution Selective Excitation of Resonance-Enhanced Multiphoton-Ionization Photoelectron Spectroscopy by Shaping Femtosecond Laser Pulses

By Wen-Jing Cheng   Shi-An Zhang   Tian-Qing Jia   Dong-Hai Feng   Zhen-Rong Sun  

Chinese Physics Letters, Vol. 31, Iss. 5, 2014-05 ,pp. : 53301-53305

IOP Publishing

Access to resources Recommend Favorite

Nonlinear resonance induced by the higher spatial coherence harmonics

By Babin S.   Podivilov E.   Potapov V.   Churkin D.   Shapiro D.  

Journal of Experimental and Theoretical Physics, Vol. 94, Iss. 4, 2002-04 ,pp. : 694-703

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite

Modeling the transitions from capacitive to inductive to wave-sustained rf discharges

By  

Le Journal de Physique IV, Vol. 08, Iss. PR7, 1998-10 ,pp. : Pr7-145-Pr7-164

Edp Sciences

Access to resources Recommend Favorite