A new method for measuring the flatness of large and thin silicon substrates using a liquid immersion technique

Author: Liu Haijun   Dong Zhigang   Huang Han   Kang Renke   Zhou Ping  

Publisher: IOP Publishing

E-ISSN: 1361-6501|26|11|115008-115017

ISSN: 0957-0233

Source: Measurement Science and Technology, Vol.26, Iss.11, 2015-11, pp. : 115008-115017

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