Fabrication of micron scale metallic structures on photo paper substrates by low temperature photolithography for device applications

Author: Cooke M D   Wood D  

Publisher: IOP Publishing

E-ISSN: 1361-6439|25|11|115017-115025

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.11, 2015-11, pp. : 115017-115025

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