Author： Won Yoonjin Gao Yuan Wardle Brian L Xiang Rong Maruyama Shigeo Kenny Thomas W Goodson Kenneth E Won Yoonjin
Publisher： IOP Publishing
E-ISSN： 1361-6439|25|11|115023-115029
ISSN： 0960-1317
Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.11, 2015-11, pp. : 115023-115029
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