Author: Perez-Gonzalez Victor H Ho Vinh Vazquez-Pinon Matias Martinez-Chapa Sergio O Kulinsky Lawrence
Publisher: IOP Publishing
E-ISSN: 1361-6439|25|11|115007-115018
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.11, 2015-11, pp. : 115007-115018
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