A novel micro/nano fabrication process based on the combined use of dielectrophoresis, electroosmotic flow, and electrodeposition for surface patterning

Author: Perez-Gonzalez Victor H   Ho Vinh   Vazquez-Pinon Matias   Martinez-Chapa Sergio O   Kulinsky Lawrence  

Publisher: IOP Publishing

E-ISSN: 1361-6439|25|11|115007-115018

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.11, 2015-11, pp. : 115007-115018

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Abstract