Highly Conductive p‐Type Zinc blende SiC Thin Films Fabricated on Silicon Substrates by Magnetron Sputtering

E-ISSN： 1551-2916|98|12|3663-3665

ISSN： 0002-7820

Source： JOURNAL OF THE AMERICAN CERAMIC SOCIETY, Vol.98, Iss.12, 2015-12, pp. : 3663-3665

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