Determination of the Free Gibbs Energy of Plate-Like Precipitates of Hydrogen Molecules and Silicon Vacancies Formed after H+ Ion Implantation into Silicon and Annealing

Publisher： Trans Tech Publications

E-ISSN： 1662-9779|2015|242|190-195

ISSN： 1012-0394

Source： Solid State Phenomena, Vol.2015, Iss.242, 2016-02, pp. : 190-195

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