Stress Measurements of Pt/PZT/Pt Thin-Film Stack on Oxidized Silicon Substrate for Micro-Actuator

By Ichiki Masaaki   Maeda Ryutaro   Zhang Lulu  

Ferroelectrics, Vol. 273, Iss. 1, 2002-01 ,pp. : 83-88

Taylor & Francis Ltd

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Formation of Tunable, Emulsion Micro-Droplets Utilizing Flow-Focusing Channels and a Normally-Closed Micro-Valve

By Wang Jung-Hao   Lee Gwo-Bin  

Micromachines, Vol. 4, Iss. 3, 2013-07 ,pp. : 306-320

MDPI

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Controllable Active Micro Droplets Merging Device Using Horizontal Pneumatic Micro Valves

By Jamshaid Afshan   Igaki Masaya   Yoon Dong Hyun   Sekiguchi Tetsushi   Shoji Shuichi  

Micromachines, Vol. 4, Iss. 1, 2013-03 ,pp. : 34-48

MDPI

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Fabrication and characterization of a magnetic micro-actuator based on deformable Fe-doped PDMS artificial cilium using 3D printing

By Liu Fengli   Alici Gursel   Zhang Binbin   Beirne Stephen   Li Weihua  

Smart Materials and Structures, Vol. 24, Iss. 3, 2015-03 ,pp. : 35015-35023

IOP Publishing

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Errors in shearography measurements due to the creep of the PZT shearing actuator

By Zastavnik Filip   Pyl Lincy   Sol Hugo   Kersemans Mathias    

Measurement Science and Technology, Vol. 25, Iss. 8, 2014-08 ,pp. : 85007-85016

IOP Publishing

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