Electrical characterization of Si doped AlN films synthesized by pulsed laser deposition

Author： Simeonov Simeon Bakalova Silvia Szekeres Anna Minkov Ivaylo Socol Gabriel Ristoscu Carmen Mihailescu Ion

E-ISSN： 1286-0050|70|1|10102-10102

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.70, Iss.1, 2015-04, pp. : 10102-10102

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