Atom probe tomography in nanoelectronics

Author： Blavette Didier Duguay Sébastien

E-ISSN： 1286-0050|68|1|10101-10101

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.68, Iss.1, 2014-09, pp. : 10101-10101

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