AlN thin films deposited by DC reactive magnetron sputtering: effect of oxygen on film growth

Author： García Molleja Javier   Gómez Bernardo José   Ferrón Julio   Gautron Eric   Bürgi Juan   Abdallah Bassam   Djouadi Mohamed Abdou   Feugeas Jorge   Jouan Pierre-Yves  

Publisher： Edp Sciences

E-ISSN： 1286-0050|64|2|20302-20302

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.64, Iss.2, 2013-11, pp. : 20302-20302

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