Effect of Ar annealing temperature on SiO₂/SiC:SiO₂ densification change causing leakage current reduction

Author： Zhong Zhi Qin Sun Zi Jiao Wang Shu Ya Dai Li Ping Zhang Guo Jun

E-ISSN： 1286-0050|62|2|20301-20301

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.62, Iss.2, 2013-04, pp. : 20301-20301

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