Calculation of boron segregation at the Si(100)/SiO2 interface

Author: Furuhashi M.   Hirose T.   Tsuji H.   Tachi M.   Taniguchi K.  

Publisher: Edp Sciences

E-ISSN: 1286-0050|27|1-3|163-166

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.27, Iss.1-3, 2010-03, pp. : 163-166

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Abstract