Prediction of LPCVD silicon film structure using combined experimental and numerical analyses

E-ISSN： 1764-7177|10|PR2|Pr2-1-Pr2-8

ISSN： 1155-4339

Source： Le Journal de Physique IV, Vol.10, Iss.PR2, 2000-02, pp. : Pr2-1-Pr2-8

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