Related content

Review on Atomic Layer Deposition and Applications of Oxide Thin Films

By Ponraj Joice Sophia   Attolini Giovanni   Bosi Matteo  

Critical Reviews in Solid State and Material Sciences, Vol. 38, Iss. 3, 2013-01 ,pp. : 203-233

Taylor & Francis Ltd

Access to resources Recommend Favorite

Atomic Layer Epitaxy Growth of AIN Thin Films

By  

Le Journal de Physique IV, Vol. 05, Iss. C5, 1995-06 ,pp. : C5-1021-C5-1027

Edp Sciences

Access to resources Recommend Favorite

ELECTROREFLECTANCE OF THIN ZINC SULFIDE FILMS GROWN BY ATOMIC LAYER EPITAXY AND ELECTRON BEAM EVAPORATION TECHNIQUES

By  

Le Journal de Physique Colloques, Vol. 44, Iss. C10, 1983-12 ,pp. : C10-239-C10-242

Edp Sciences

Access to resources Recommend Favorite

Growing aluminum nitride films by Plasma-Enhanced Atomic Layer Deposition at low temperatures

By  

Journal of Physics: Conference Series , Vol. 652, Iss. 1, 2015-11 ,pp. : 187-192

IOP Publishing

Access to resources Recommend Favorite

Yttria-doped zirconia thin films deposited by atomic layer deposition ALD: a structural, morphological and electrical characterisation

By Bernay C.   Ringuede A.   Colomban P.   Lincot D.   Cassir M.  

Journal of Physics and Chemistry of Solids, Vol. 64, Iss. 9, 2003-09 ,pp. : 1761-1770

Elsevier

Access to resources Recommend Favorite