TiN-TixSiy Codeposits A.P.C.V.D. Produced Using the TiCl4-N2-SiH2Cl2-H2 System

Publisher: Edp Sciences

E-ISSN: 1764-7177|05|C5|C5-801-C5-807

ISSN: 1155-4339

Source: Le Journal de Physique IV, Vol.05, Iss.C5, 1995-06, pp. : C5-801-C5-807

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