Ellipsometric analysis for CVD thick films on weakly absorbing substrates

Publisher: Edp Sciences

E-ISSN: 1764-7177|03|C3|C3-189-C3-193

ISSN: 1155-4339

Source: Le Journal de Physique IV, Vol.03, Iss.C3, 1993-08, pp. : C3-189-C3-193

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