Modeling the transitions from capacitive to inductive to wave-sustained rf discharges

E-ISSN： 1764-7177|08|PR7|Pr7-145-Pr7-164

ISSN： 1155-4339

Source： Le Journal de Physique IV, Vol.08, Iss.PR7, 1998-10, pp. : Pr7-145-Pr7-164

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