CVD niobium in Nb-Hal-(H)-inert gas systems : A thermodynamic and experimental approaches

Publisher: Edp Sciences

E-ISSN: 1764-7177|09|PR8|Pr8-93-Pr8-99

ISSN: 1155-4339

Source: Le Journal de Physique IV, Vol.09, Iss.PR8, 1999-09, pp. : Pr8-93-Pr8-99

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