Diffusion of nitrogen implanted in titanium nitride (TiN1-x)

Publisher： Edp Sciences

E-ISSN： 0035-1687|25|11|1113-1119

ISSN： 0035-1687

Source： Revue de Physique Appliquée (Paris), Vol.25, Iss.11, 1990-11, pp. : 1113-1119

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