INTERACTIONS OF Si (III) SURFACE WITH H2, NH3, SiH4 MULTIPOLAR PLASMAS STUDIED BY IN SITU ELLIPSOMETRY

Publisher： Edp Sciences

E-ISSN： 0449-1947|44|C10|C10-253-C10-256

ISSN： 0449-1947

Source： Le Journal de Physique Colloques, Vol.44, Iss.C10, 1983-12, pp. : C10-253-C10-256

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