MORPHOLOGY AND RESISTIVITY OF CVD POLYCRYSTALLINE SILICON LAYERS CONTAINING CARBON

Publisher： Edp Sciences

E-ISSN： 0449-1947|43|C1|C1-307-C1-312

ISSN： 0449-1947

Source： Le Journal de Physique Colloques, Vol.43, Iss.C1, 1982-10, pp. : C1-307-C1-312

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