CONVECTION AND CHEMISTRY EFFECTS IN CVD - A 3-D ANALYSIS FOR SILICON DEPOSITION

Publisher： Edp Sciences

E-ISSN： 0449-1947|50|C5|C5-17-C5-34

ISSN： 0449-1947

Source： Le Journal de Physique Colloques, Vol.50, Iss.C5, 1989-05, pp. : C5-17-C5-34

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content

Deposition of ternary silicon based compounds by CVD techniques

By  

Le Journal de Physique IV, Vol. 09, Iss. PR8, 1999-09 ,pp. : Pr8-101-Pr8-107

Edp Sciences

Access to resources Recommend Favorite

Deposition Kinetics of CVD-Silicon Carbonitride Coatings

By  

Le Journal de Physique IV, Vol. 05, Iss. C5, 1995-06 ,pp. : C5-229-C5-234

Edp Sciences

Access to resources Recommend Favorite

Deposition and characterization of CVD – MoO3 thin films

By  

Le Journal de Physique IV, Vol. 09, Iss. PR8, 1999-09 ,pp. : Pr8-453-Pr8-459

Edp Sciences

Access to resources Recommend Favorite

X-ray spectral analysis of the interface of a thin Al2O3 film prepared on silicon by atomic layer deposition

By Shulakov A.   Braiko A.   Bukin S.   Drozd V.  

Physics of the Solid State, Vol. 46, Iss. 6, 2004-06 ,pp. : 1145-1148

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite

Effects of non-grey radiative transfer on 3D simulations of solar magneto-convection

By  

Astronomy & Astrophysics, Vol. 421, Iss. 2, 2004-07 ,pp. : 755-762

Edp Sciences

Access to resources Recommend Favorite