Modeling a mim capacitor including series resistance and inductance for characterizing nanometer high‐K dielectric films

Publisher： John Wiley & Sons Inc

E-ISSN： 1098-2760|58|11|2599-2602

ISSN： 0895-2477

Source： MICROWAVE AND OPTICAL TECHNOLOGY LETTERS, Vol.58, Iss.11, 2016-11, pp. : 2599-2602

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