AES, EELS and TRIM simulation method study of InP(100) subjected to Ar⁺, He⁺ and H⁺ ions bombardment.

E-ISSN： 2100-014x|29|issue|00020-00020

ISSN： 2100-014x

Source： EPJ Web of Conference, Vol.29, Iss.issue, 2012-06, pp. : 00020-00020

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