Dépôt et calibration de multicouches pour l'optique XUVdans la gamme 10–30 nm

Publisher: Edp Sciences

E-ISSN: 1764-7177|108|issue|255-258

ISSN: 1155-4339

Source: Le Journal de Physique IV, Vol.108, Iss.issue, 2003-06, pp. : 255-258

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